KSR-4 FOUR POINT PROBE

Overview

Everbeing’s four point probe uses the four co-linear probes on contact to determine the sheet resistance of your wafer or thin films. The method uses the four terminal sensing or “Kelvin” approach by using separate junctions for voltage and current instead of through the same connection. As a result, internal resistance, lead or contact resistance is reduced and lower ohm values can be read.

This four point probe stand can also be used for the following applications:

Feautres

• 6", 8", 12" round or square chuck
• Lever Driven Up/Down 30 mm Travel
• Z Resolution 20 um
• Probe Pin Spacing 40 mil/50 mil/62.5 mil
• Probe Pin Diameter 40.6 um